JPH0536097B2 - - Google Patents

Info

Publication number
JPH0536097B2
JPH0536097B2 JP60096095A JP9609585A JPH0536097B2 JP H0536097 B2 JPH0536097 B2 JP H0536097B2 JP 60096095 A JP60096095 A JP 60096095A JP 9609585 A JP9609585 A JP 9609585A JP H0536097 B2 JPH0536097 B2 JP H0536097B2
Authority
JP
Japan
Prior art keywords
liquid material
temperature
gas
bubbling
material gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60096095A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61257232A (ja
Inventor
Yoshitaka Ina
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON TYLAN KK
Original Assignee
NIPPON TYLAN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON TYLAN KK filed Critical NIPPON TYLAN KK
Priority to JP9609585A priority Critical patent/JPS61257232A/ja
Publication of JPS61257232A publication Critical patent/JPS61257232A/ja
Publication of JPH0536097B2 publication Critical patent/JPH0536097B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/008—Feed or outlet control devices
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/81—Constructional details of the feed line, e.g. heating, insulation, material, manifolds, filters
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/86—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid by bubbling a gas through the liquid
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/87—Controlling the temperature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
JP9609585A 1985-05-08 1985-05-08 液体材料ガス発生方法 Granted JPS61257232A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9609585A JPS61257232A (ja) 1985-05-08 1985-05-08 液体材料ガス発生方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9609585A JPS61257232A (ja) 1985-05-08 1985-05-08 液体材料ガス発生方法

Publications (2)

Publication Number Publication Date
JPS61257232A JPS61257232A (ja) 1986-11-14
JPH0536097B2 true JPH0536097B2 (en]) 1993-05-28

Family

ID=14155832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9609585A Granted JPS61257232A (ja) 1985-05-08 1985-05-08 液体材料ガス発生方法

Country Status (1)

Country Link
JP (1) JPS61257232A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2996101B2 (ja) 1994-08-05 1999-12-27 信越半導体株式会社 液体原料ガスの供給方法および装置
JP4505077B2 (ja) * 1999-04-30 2010-07-14 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 トリクロロシランガス気化供給装置
KR20030005648A (ko) * 2001-07-09 2003-01-23 주식회사 세미텔 자동 리필 기능을 갖는 버블러

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4278458A (en) * 1979-02-07 1981-07-14 Bell Telephone Laboratories, Incorporated Optical fiber fabrication method and apparatus
JPS60248228A (ja) * 1984-05-24 1985-12-07 Sumitomo Electric Ind Ltd バブリング装置

Also Published As

Publication number Publication date
JPS61257232A (ja) 1986-11-14

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term